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Upgrade L3510 Classic systems to greatly enhance the performance and extend the life of your current GaSonics semiconductor process equipment.


The Upgraded GaSonics L3510 Classic Single Wafer Downstream Ash or Etch System

  • NEW Pentium Upgrade
  • NEW Power Supply Design
  • NEW LCD Display
  • Less parts
Process Results & Specifications:
  • Microwave Plasma
  • Platen Heating; 100-300°C
  • Ash Rate: 1 to 8µm/min
  • Throughput: Up to 60wph
  • Uniformity: ± 10%
  • Descum: 500 - 1000Å/ 30 – 60wph
  • Implanted: 25 – 60 wph
  • CV Shift: ≤ 0.1v
  • Electrical: 208/Single Phase, 30amps
  • Dimensions: 30”W X 38”D X 58”H

GaSonics equipment is the industry leader in low-cost ashing and etching systems. SPEC Equipment can support your GaSonics products in the field, as well as providing parts, upgrades or remanufacturing.

New LCD Display:

  • Easier to read and maintain
  • Easy installation
  • Convenient availability

New Pentium CPU

  • Newdesign power supply replaces 3
  • Reliable and easy to maintain
  • New Pentium CPU replaces the DX 486

New Electrodes

  • 6-post electrode
  • Better microwave delivery and reliability

Redesigned Wafer Chuck.

  • Cooled wafer chuck has been redesigned without water connections
  • Water-cooling served no purpose with old design
  • Water leaks are no longer possible

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