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Home > Upgrade L3510 Classic

Upgrade L3510 Classic systems to greatly enhance the performance and extend the life of your current GaSonics semiconductor process equipment.

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The Upgraded GaSonics L3510 Classic Single Wafer Downstream Ash or Etch System

Features:
  • NEW Pentium Upgrade
  • NEW Power Supply Design
  • NEW LCD Display
  • Less parts
Process Results & Specifications:
  • Microwave Plasma
  • Platen Heating; 100-300°C
  • Ash Rate: 1 to 8µm/min
  • Throughput: Up to 60wph
  • Uniformity: ± 10%
  • Descum: 500 - 1000Å/ 30 – 60wph
  • Implanted: 25 – 60 wph
  • CV Shift: ≤ 0.1v
  • Electrical: 208/Single Phase, 30amps
  • Dimensions: 30”W X 38”D X 58”H
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GaSonics equipment is the industry leader in low-cost ashing and etching systems. SPEC Equipment can support your GaSonics products in the field, as well as providing parts, upgrades or remanufacturing.

New LCD Display:

  • Easier to read and maintain
  • Easy installation
  • Convenient availability
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New Pentium CPU

  • Newdesign power supply replaces 3
  • Reliable and easy to maintain
  • New Pentium CPU replaces the DX 486
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New Electrodes

  • 6-post electrode
  • Better microwave delivery and reliability
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Redesigned Wafer Chuck.

  • Cooled wafer chuck has been redesigned without water connections
  • Water-cooling served no purpose with old design
  • Water leaks are no longer possible


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