Servicing Karl Suss/Suss MicroTec and other Photolithography Systems

SPEC Equipment specializes in Suss MicroTec (Karl Suss) photolithography systems as well as other lithography systems found in most semiconductor fabs.

We can calibrate, repair, refurbish or even rebuild many Suss MicroTec models to meet original manufacturer's specifications. Our fully refurbished photolithography tools provide guaranteed performance with huge savings.

SPEC is a leading mask aligner company with in-depth knowledge of the following Suss MicroTec / Karl Suss tools:

In addition to high-quality, pre-owned tools, we offer system software and hardware performance upgrades to extend the capabilities of existing equipment. We provide parts, parts repair or exchange for obsolete Suss MicroTec / Karl Suss lithography equipment.