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Your source for support of KLA-Tencor Metrology products

SPEC Equipment provides second source services, spares, and technical support to the semiconductor fabrication marketplace. We specialize in KLA-Tencor metrology systems. We provide high-quality refurbished and remanufactured KLA-Tencor product lines with guaranteed performance at exceptional values.

In addition, we offer system performance upgrades to extend and better the capabilities of existing KLA-Tencor equipment. SPEC follows all KLA-Tencor refurbishment procedures and use qualified KLA-Tencor parts and technicians. Whether on-site or in-house, SPEC provides top-notch customer service.


Our field support and maintenance services are unmatched in the semiconductor marketplace. SPEC Equipment's professional service engineers have more than 25 years of combined experience with KLA-Tencor equipment, ensuring the best service available on the market for these systems.

We also provide parts, parts repair, and exchanges for obsolete Tencor and KLA Surfscan equipment.


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