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Wafer - Mask Cleaning Systems

Dainippon SSW-60A-AR

Equipment: Dainippon SSW-60A-AR
Manufacturer: Dainippon
Description:  Scrubber. Single top side scrub - single backside with brush.
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Evergreen SSEC 50XP Cleaner

Equipment: Evergreen SSEC 50XP Cleaner
Manufacturer: Evergreen
Description: This single-sided cleaner is a fully automatic machine designed to scrub, rinse, and spin dry carriers. It's a PC-controlled tool that can store multiple programs with multiple events.
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Evergreen SSEC M10 Cleaner

Equipment: Evergreen SSEC M10 Cleaner
Manufacturer: Evergreen
Description: This single-sided cleaner is a fully automatic machine designed to scrub, rinse, and spin dry carriers. The carriers are loaded manually onto the vacuum fixture. PC-controlled tool can store multiple programs with multiple events.
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Fluoroware HTC 4000 Cassette/Box Washer

Equipment: Fluoroware HTC 4000 Cassette/Box Washer
Manufacturer: Fluoroware
Description: A stainless steel, dual action peripheral cleaning system. It is capable of 2" to 8" wafer cassettes and cassette holders.
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Semitool S-260 Single Stack SRD

Equipment: Semitool S-260 Single Stack SRD
Manufacturer: Semitool
Description:  A single stack spin rinse dryer (SRD).
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Semitool WST 306 Water Soluble Develop/Strip Tool

Equipment: Semitool WST 306 Water Soluble Develop/Strip Tool
Manufacturer: Semitool
Description:
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Semitool ST-860 Double Stack SRD

Equipment: Semitool ST-860 Double Stack SRD
Manufacturer: Semitool
Description:  A double stack spin rinse dryer.
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Verteq 1600 SRD Spin Rinse Dryer

Equipment: Verteq 1600 SRD Spin Rinse Dryer
Manufacturer: Verteq
Description:  A spin rinse dryer that accommodates wafers between 4" to 6".
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Yield Engineering YES R-3 Plasma Cleaning System

Equipment: Yield Engineering YES R-3 Plasma Cleaning System
Manufacturer: Yield Engineering
Description:
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Semitool ST-270 SRD

Equipment: Semitool ST-270 SRD
Manufacturer: Semitool
Description:
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ASYST VersaPort 2200

Equipment: ASYST VersaPort 2200
Manufacturer: ASYST
Description: The VersaPort 2200 is a 200mm class load port for presenting wafers on reticles to the process tool while maintaining better-than-Class 1 cleanroom environment for the substrate.
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Fluoroware HTC 8020 Cassette Box Washer

Equipment: Fluoroware HTC 8020 Cassette Box Washer
Manufacturer: Fluoroware
Description:
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Verteq 1800-6AR Mobile Single Stack SRD

Equipment: Verteq 1800-6AR Mobile Single Stack SRD
Manufacturer: Verteq
Description:
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