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Tegal 903E Plasma Etch System

Equipment: Tegal 903E Plasma Etch System
Manufacturer: Tegal
Description:

Cassette to cassette single wafer plasma etcher system.

 


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Tegal AG-T Circulating System Chiller

Equipment: Tegal AG-T Circulating System Chiller
Manufacturer: Tegal
Description:

 Circulating system chiller.


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