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Technics PEIIB Planar Etch Plasma System

Equipment: Technics PEIIB Planar Etch Plasma System
Manufacturer: Technics
Description:

 Oxygen planar etcher may be used for surface activation and/or photoresist descum.


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Technics PEIIA PECVD / RIE System

Equipment: Technics PEIIA PECVD / RIE System
Manufacturer: Technics
Description:

 The Technics PEII-A is a plasma etching system used for descumming/ashing of photoresist and nitride etching.


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