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SPEC Aura 1000PC / GaSonics Aura 1000

SPEC Aura 1000PC

Equipment: SPEC Aura 1000PC
Manufacturer: GaSonics
Description:


 


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GaSonics Aura 1000

Equipment: GaSonics Aura 1000
Manufacturer: GaSonics
Description:

The GaSonics Aura 1000 single-wafer photoresist asher is an automated tool designed as a flexible downstream plasma photoresist removal system for high-volume wafer fabrication. GaSonics offers the Aura in direct response to manufacturers' concern about wafer sensitivity to processing damage, reliability, and low cost of ownership. 


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