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SPEC 3510PC / GaSonics L3510

NEW SP 3510PC

Equipment: NEW SP 3510PC
Manufacturer: GaSonics
Description:

SPEC Equipment has developed a new and improved PC-based 3510 system. This new system replaces the legacy GaSonics L3510. The SP 3510PC is a custom downstream photoresist removal system that utilizes time-tested process hardware components while replacing legacy control items and other obsolete devices and hardware. With numerous modernizations such as newly-designed contemporary control system, a full-color Graphic User Interface, real-time graphing, saved data recall, this system is unparalleled in the industry.

 


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GaSonics L3510 Single Wafer Ashing System

Equipment: GaSonics L3510 Single Wafer Ashing System
Manufacturer: GaSonics
Description:

The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L3510 has a wide process window due to its patented microwave plasma source. Programmable heating and process controls contribute to the system's unparalleled process flexibility.


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