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Downstream Endpoint Detector Upgrade (GaSonics Aura 1000)

Equipment: Downstream Endpoint Detector Upgrade (GaSonics Aura 1000)
Manufacturer: SPEC
Description:

The GaSonics Aura 1000 (A1000) Downstream Endpoint Detector upgrade is a remote mounted detector enhancement for your existing Aura 1000 system. Developed by SPEC, this cost effective and rapidly deployed upgrade addresses key usability and process issues while dramatically increasing efficiency of downstream endpoint detection of existing Aura 1000 Systems.


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NEW SP 3510PC

Equipment: NEW SP 3510PC
Manufacturer: SPEC
Description:

SPEC Equipment has developed a new and improved PC-based 3510 system. This new system replaces the legacy GaSonics L3510. The SP 3510PC is a custom downstream photoresist removal system that utilizes time-tested process hardware components while replacing legacy control items and other obsolete devices and hardware. With numerous modernizations such as newly-designed contemporary control system, a full-color Graphic User Interface, real-time graphing, saved data recall, this system is unparalleled in the industry.

 


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GaSonics L3510 Single Wafer Ashing System

Equipment: GaSonics L3510 Single Wafer Ashing System
Manufacturer: SPEC
Description:

The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L3510 has a wide process window due to its patented microwave plasma source. Programmable heating and process controls contribute to the system's unparalleled process flexibility.


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