Need Help?
Home > Equipment List

Rudolph

Rudolph Auto EL 2345A

Equipment: Rudolph Auto EL 2345A
Manufacturer: Rudolph
Description:

 Ellipsometer, 1979 vintage. 


View Details >>

Rudolph Research Auto EL III Ellipsometer

Equipment: Rudolph Research Auto EL III Ellipsometer
Manufacturer: Rudolph
Description:

The Rudolph Ellipsometer AutoELIII allows measurement of the thickness and refractive index of one or two thin transparent films on a substrate.


View Details >>

Rudolph Research Auto EL IV Ellipsometer

Equipment: Rudolph Research Auto EL IV Ellipsometer
Manufacturer: Rudolph
Description:

 The AutoEl IV has automatic 3 wavelength operation and a scanning stage. Multiple wavelength operation gives this instrument more flexibility for meauring multiple film stacks. The scanning stage allows wafer uniformity to be measured. The system automatically calculates ellipsometric parameters, thickness, and index


View Details >>

Rudolph Research FE-III Focus Ellipsometer

Equipment: Rudolph Research FE-III Focus Ellipsometer
Manufacturer: Rudolph
Description:

The FE-III has fully automatic operation and a scanning stage. Unique optical and detection systems measure ellipsometric parameters over an angle range of 40 to 70 degrees simultaneously, giving more flexibility for measuring multiple film stacks. The scanning stage allows wafer uniformity to be evaluated rapidly. The system automatically calculates film thickness, index of refraction, and the extinction coefficient. Automatic or manual wafer loading; can be used with small pieces or full wafers up to 8” diameter.


View Details >>

Rudolph Research FE-IIID Focus Dual Wavelength Ellipsometer

Equipment: Rudolph Research FE-IIID Focus Dual Wavelength Ellipsometer
Manufacturer: Rudolph
Description:

 The FE III-D's advanced Focused Beam™ system uses dual wavelength technology to directly measure the sample with a small spot at multiple angles of incidence and at multiple wavelengths. This allows the system to define more variables, increasing the certainty of the results on complex multi-layer films.


View Details >>

© 2017 SPEC Equipment. All Rights Reserved.