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Rapid Thermal Annealing - Furnaces

AG Associates 4100 Heatpulse

Equipment: AG Associates 4100 Heatpulse
Manufacturer: AG Associates
Description: Rapid Thermal Processor System with Single Wafer Processing capability up to 6" Wafers.
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AG Associates 610 Heatpulse

Equipment: AG Associates 610 Heatpulse
Manufacturer: AG Associates
Description: Rapid Thermal Processor PC Controller with  2" to 6" Wafers Capability
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AG Associates 8108 Heatpulse

Equipment: AG Associates 8108 Heatpulse
Manufacturer: AG Associates
Description: Rapid thermal processor system with the processing capability of up to 8"
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AG Associates Heatpulse 410

Equipment: AG Associates Heatpulse 410
Manufacturer: AG Associates
Description: Rapid thermal processor with a 2 - 5" wafer capability.
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Steag AST SHS2000 - Rapid Thermal Processor

Equipment: Steag AST SHS2000 - Rapid Thermal Processor
Manufacturer: Steag
Description:   Rapid thermal single wafer processor, prealigner and controller.
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Thermco MB-71 Laboratory Diffusion Furnace

Equipment: Thermco MB-71 Laboratory Diffusion Furnace
Manufacturer: Thermco
Description:
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