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Plasmatherm

Plasma-Therm 790 Dual Chamber PECVD & RIE System

Equipment: Plasma-Therm 790 Dual Chamber PECVD & RIE System
Manufacturer: Plasmatherm
Description:

The 790 platform, offered in both RIE and PECVD configurations, has been field demonstrated to have low maintenance requirements and is easily operated in R&D through high production environments.


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Plasma-Therm 730 SLR PECVD Load-Locked System

Equipment: Plasma-Therm 730 SLR PECVD Load-Locked System
Manufacturer: Plasmatherm
Description:

Plasma Shuttle-Lock load-lock loading system with platen transfer.


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