Need Help?
Home > Equipment List

PEP 3510

GaSonics PEP 3510A/A Dual Chamber

Equipment: GaSonics PEP 3510A/A Dual Chamber
Manufacturer: GaSonics

The GaSonics PEP 3510A is a versatile microwave downstream photoresist removal system, designed for clean, damage-free removal of photoresist. PEP 3510A utilizes a combination of platen and lamp wafer heating resulting in excellent removal rates and uniformity. This system excels in bulk photoresist removal, and descum applications.

View Details >>

© 2018 SPEC Equipment. All Rights Reserved.