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PEP 3510

GaSonics PEP 3510A/A Dual Chamber

Equipment: GaSonics PEP 3510A/A Dual Chamber
Manufacturer: GaSonics
Description:

The GaSonics PEP 3510A is a versatile microwave downstream photoresist removal system, designed for clean, damage-free removal of photoresist. PEP 3510A utilizes a combination of platen and lamp wafer heating resulting in excellent removal rates and uniformity. This system excels in bulk photoresist removal, and descum applications.


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