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PECVD - LEPVD Systems

Watkins Johnson (WJ) 1500

Equipment: Watkins Johnson (WJ) 1500
Manufacturer: Watkins Johnson
Description:  With nearly 300 systems worldwide, the WJ-1500 has been proven for high productivity and reliability.
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Watkins Johnson (WJ) 1000

Equipment: Watkins Johnson (WJ) 1000
Manufacturer: Watkins Johnson
Description: The WJ-1000 is an efficient and productive APCVD system well-known by major fabs worldwide.
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Watkins Johnson (WJ) 999R APCVD

Equipment: Watkins Johnson (WJ) 999R APCVD
Manufacturer: Watkins Johnson
Description:
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Technics PEIIB Planar Etch Plasma System

Equipment: Technics PEIIB Planar Etch Plasma System
Manufacturer: Technics
Description:  Oxygen planar etcher may be used for surface activation and/or photoresist descum.
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Plasma-Therm 790 Dual Chamber PECVD & RIE System

Equipment: Plasma-Therm 790 Dual Chamber PECVD & RIE System
Manufacturer: Plasmatherm
Description: The 790 platform, offered in both RIE and PECVD configurations, has been field demonstrated to have low maintenance requirements and is easily operated in R&D through high production environments.
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Plasma-Therm 730 SLR PECVD Load-Locked System

Equipment: Plasma-Therm 730 SLR PECVD Load-Locked System
Manufacturer: Plasmatherm
Description: Plasma Shuttle-Lock load-lock loading system with platen transfer.
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Technics PEIIA PECVD / RIE System

Equipment: Technics PEIIA PECVD / RIE System
Manufacturer: Technics
Description:  The Technics PEII-A is a plasma etching system used for descumming/ashing of photoresist and nitride etching.
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