Features:

• Objectives: 10X, 50X, 100X
• 6 turret
• Nomarski DIC
• Tilting trinocular heads, 10X eyepieces
• Nikon RCP-21 Remote scope
• Color video camera
• Camera adapter
• 8" wafer stage
• Keyboard and Mouse

Specifications:

 MicroMetric MicroLine 300 Features/Specifications:

• Measures Linewidths: 0.5-40 µm (100X objective). 10-800 µm (5X objective)
• Linewidth Measurement Repeatability: 4 nm (1 Sigma) on wafers. 2 nm (1 Sigma) on photomasks
• Options: Wafer loader with prealigner, label printer, transmitted illumination, part holders, additional objectives and SECS communication.
• Footprint: 33" x 40" or 30"
• Power: 110 VAC @ 3 Amps or 220 VAC @ 1.5 Amps