Equipment: KLA-Tencor Surfscan 6420 Inspection System
Manufacturer:
KLA-Tencor , KLA-Tencor Equipment
Description: KLA-Tencor Surfscan 6420 Inspection System, a surface inspection tool for unpatterned wafers. It accommodates wafer sizes: 100, 125, 150, and 200mm (round or rectangular substrates). The 6420 is a film surface analyzer System detects sub micron particles on polysilicon, tungsten, epitaxial and polished silicon.
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