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Metrology - Inspection Systems

Dektak 3030

Equipment: Dektak 3030
Manufacturer: Dektak
Description:  Profilometer.
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KLA-Tencor SFS 5000

Equipment: KLA-Tencor SFS 5000
Manufacturer: KLA-Tencor / ADE , KLA-Tencor
Description:  Surfscan 
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Rudolph Auto EL 2345A

Equipment: Rudolph Auto EL 2345A
Manufacturer: Rudolph
Description:  Ellipsometer, 1979 vintage. 
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Rudolph Research Auto EL III Ellipsometer

Equipment: Rudolph Research Auto EL III Ellipsometer
Manufacturer: Rudolph
Description: The Rudolph Ellipsometer AutoELIII allows measurement of the thickness and refractive index of one or two thin transparent films on a substrate.
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August Technology / Nanometrics NSX-80 Automated Defect Inspection System

Equipment: August Technology / Nanometrics NSX-80 Automated Defect Inspection System
Manufacturer: Nanometrics
Description: Automated vision-based defect-inspection system performs 25,000 pass/fail quality wafer and die checks a day compared to manually screening and classifying a few thousand die per day.
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Dektak 3030 Surface Profiler

Equipment: Dektak 3030 Surface Profiler
Manufacturer: Dektak
Description: Measures vertical features ranging in height from 131 micron to 50 angstroms on a variety of substrate surfaces.
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Dektak IIA (Sloan)

Equipment: Dektak IIA (Sloan)
Manufacturer: Dektak
Description: Surface Profile Measuring System, Capability up to 6".
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Electroglas Xynetics 1034X Wafer Prober with Station

Equipment: Electroglas Xynetics 1034X Wafer Prober with Station
Manufacturer: Electroglas/Xynetics
Description: This tool is designed to provide a high throughput capacity. It features a temptronics 4 inch thermal Chuck and Miller temperature controller.
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KLA-Tencor OmniMap RS100 Resistivity Mapping System

Equipment: KLA-Tencor OmniMap RS100 Resistivity Mapping System
Manufacturer: KLA-Tencor Equipment
Description:  With the ability to measure materials such as polysilicon, copper, and bulk silicon substrates. System capable of running 200mm and 300mm wafers.
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ADE UltraGage 9500

Equipment: ADE UltraGage 9500
Manufacturer: ADE Equipment
Description:  Measures thickness, shape stress, global and site flatness.
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KLA-Tencor 5100XP Overlay Measurement System

Equipment: KLA-Tencor 5100XP Overlay Measurement System
Manufacturer: KLA-Tencor Equipment
Description: The KLA-Tencor 5100 XP system is a metrology tool which performs Overlay (misregistration), CD (optional), and Height measurements(optional) automatically on thin film semiconductor wafers. Measurements are made in three dimensions based on the Coherence Probe Metrology (CPM) technology.
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InspecTech KIS 2000 Inspection System

Equipment: InspecTech KIS 2000 Inspection System
Manufacturer: InspecTec
Description: An automatic inspection tool that inspects both sides of diced wafers for any chipping or cracking. It also monitors kerf chipping sizes, kerf width, misalignment, as well as the proximity of damages to the edges.
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KLA-Tencor Surfscan 6400 Film Surface Analysis System

Equipment: KLA-Tencor Surfscan 6400 Film Surface Analysis System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: KLA-Tencor 6400 Surfscan film surface analysis system for detection of contaminating particles. Detects contaminating partciles on all surfaces even rough surfaces. Small particles on dielectrics, polysilicon, backside silicon and rough metal films can be detected and particles as small as 0.12 micro-meters can be located on polished silicon and epitaxial layers.
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KLA-Tencor 5200 Overlay Inspection System

Equipment: KLA-Tencor 5200 Overlay Inspection System
Manufacturer: KLA-Tencor Equipment
Description:
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KLA-Tencor 6200 Surfscan Analysis System

Equipment: KLA-Tencor 6200 Surfscan Analysis System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  Wafer surface contamination analyzer for unpatterned wafers.
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ADE 8100 Microscan

Equipment: ADE 8100 Microscan
Manufacturer: ADE , ADE Equipment
Description:  Measures wafer thickness, bow, warp, site flatness, and global flatness.
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ADE UltraScan 9300 Wafer Inspection System

Equipment: ADE UltraScan 9300 Wafer Inspection System
Manufacturer: ADE , ADE Equipment
Description: Non-contact capacitive probe measurement with 10nm resolution, and 400 to 1000 microns wafer thickness range. It is capable of handling 100mm to 200mm wafers.
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ADE UltraScan 9350 Wafer Inspection / Sorter System

Equipment: ADE UltraScan 9350 Wafer Inspection / Sorter System
Manufacturer: ADE , ADE Equipment
Description: Non-contact capacitive probe measurement with 10nm resolution, 400 to 1000 microns wafer thickness range. Capable of handling 100mm to 200mm wafers
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KLA-Tencor AIT I (8020)

Equipment: KLA-Tencor AIT I (8020)
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: A double darkfield patterned wafer inspection tool.
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KLA-Tencor Surfscan 7600 Particle Inspection System

Equipment: KLA-Tencor Surfscan 7600 Particle Inspection System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  A particle inspection tool - capable of up to 200mm wafers.
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KLA-Tencor Surfscan 7700 Wafer Inspection System

Equipment: KLA-Tencor Surfscan 7700 Wafer Inspection System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: A patterned and unpatterned wafer inspection and can accommodate wafers between 4" to 8".
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KLA-Tencor 6100 Surfscan Analysis System

Equipment: KLA-Tencor 6100 Surfscan Analysis System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: Unpatterned wafer surface contamination analyzer
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KLA-Tencor UltraPointe CRS1010 Defect Review Station

Equipment: KLA-Tencor UltraPointe CRS1010 Defect Review Station
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:
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KLA-Tencor P20H Long Scan Profiler

Equipment: KLA-Tencor P20H Long Scan Profiler
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: Long scan profiler measurement tool.
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KLA-Tencor AIT I In-Line Defect Inspection System

Equipment: KLA-Tencor AIT I In-Line Defect Inspection System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: Automated full water inspection system for detecting particles as small as 0.10 micrometers on bare silicon and patterned process wafers
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KLA-Tencor FleXus FLX-2300

Equipment: KLA-Tencor FleXus FLX-2300
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  Thin-film stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film.
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KLA-Tencor Surfscan 5500 Surface Particle Inspection Analyzer

Equipment: KLA-Tencor Surfscan 5500 Surface Particle Inspection Analyzer
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:
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KLA-Tencor FleXus FLX 2320

Equipment: KLA-Tencor FleXus FLX 2320
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  Thin-film stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film.
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KLA-Tencor Surfscan 6420 Inspection System

Equipment: KLA-Tencor Surfscan 6420 Inspection System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: KLA-Tencor Surfscan 6420 Inspection System, a surface inspection tool for unpatterned wafers. It accommodates wafer sizes: 100, 125, 150, and 200mm (round or rectangular substrates). The 6420 is a film surface analyzer System detects sub micron particles on polysilicon, tungsten, epitaxial and polished silicon.
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KLA-Tencor P-10 Surface Profiler

Equipment: KLA-Tencor P-10 Surface Profiler
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: A computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.
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KLA-Tencor 2131 Defect Inspection System Upgraded to 2132

Equipment: KLA-Tencor 2131 Defect Inspection System Upgraded to 2132
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  The KLA-Tencor 2132 is a wafer defect inspection system.
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KLA-Tencor Model AIT XP Darkfield Inspection System

Equipment: KLA-Tencor Model AIT XP Darkfield Inspection System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: The KLA-Tencor AIT XP+ Patterned Wafer Inspection system is designed to meet the needs of 0.13um and beyond design rule processes. Based on the highly popular AIT series, the AIT XP+ incorporates Mixed Mode Detectors with Adaptive Mode for increased defect detection and sensitivity. Able to process both 200mm (8”) and 300mm (12”) wafers, the AIT XP+ allows for accelerated 300mm yield learning and faster production ramp. Significant Cost of Ownership (CoO) improvements are realized with the sensitivity enhancements achieved with Adaptive Mode that allow for spot size migration.
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KLA-Tencor HRP 320 High Resolution Profiler

Equipment: KLA-Tencor HRP 320 High Resolution Profiler
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: HRP (High Resolution Profiler) series from KLA-Tencor provides a comprehensive automated surface metrology solution for in-line process control of CMP and etch.  
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KLA-Tencor 6220 Surfscan

Equipment: KLA-Tencor 6220 Surfscan
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  This tool detects, counts, and sizes defects
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KLA-Tencor 7700 Wafer Inspection System (M)

Equipment: KLA-Tencor 7700 Wafer Inspection System (M)
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description:  Patterned / Unpatterned wafer inspection system.
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KLA-Tencor UV-1050 Thin Film Measurement System

Equipment: KLA-Tencor UV-1050 Thin Film Measurement System
Manufacturer: KLA-Tencor Equipment
Description: The UV-1050's field-proven pattern recognition, extensive analysis software, and high reliability add up to an advanced thin film measurement tool with the lowest cost of ownership in its class. Inventory: Two newly refurbished and ready to go No warranty
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KLA-Tencor SP1-TBI Unpatterned Surface Inspection System

Equipment: KLA-Tencor SP1-TBI Unpatterned Surface Inspection System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: KLA-Tencor's SP1 configured with KLA-Tencor's Trible-Beam Illumination (TBI).
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KLA-Tencor RS55TC

Equipment: KLA-Tencor RS55TC
Manufacturer: KLA-Tencor Equipment
Description:  OmniMap Four Point Probe Resistivity Mapping System 
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Veeco Dektak 3ST Surface Profiler

Equipment: Veeco Dektak 3ST Surface Profiler
Manufacturer: Veeco
Description: Surface profile measuring system.
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Rudolph Research Auto EL IV Ellipsometer

Equipment: Rudolph Research Auto EL IV Ellipsometer
Manufacturer: Rudolph
Description:  The AutoEl IV has automatic 3 wavelength operation and a scanning stage. Multiple wavelength operation gives this instrument more flexibility for meauring multiple film stacks. The scanning stage allows wafer uniformity to be measured. The system automatically calculates ellipsometric parameters, thickness, and index
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Rudolph Research FE-III Focus Ellipsometer

Equipment: Rudolph Research FE-III Focus Ellipsometer
Manufacturer: Rudolph
Description: The FE-III has fully automatic operation and a scanning stage. Unique optical and detection systems measure ellipsometric parameters over an angle range of 40 to 70 degrees simultaneously, giving more flexibility for measuring multiple film stacks. The scanning stage allows wafer uniformity to be evaluated rapidly. The system automatically calculates film thickness, index of refraction, and the extinction coefficient. Automatic or manual wafer loading; can be used with small pieces or full wafers up to 8” diameter.
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Rudolph Research FE-IIID Focus Dual Wavelength Ellipsometer

Equipment: Rudolph Research FE-IIID Focus Dual Wavelength Ellipsometer
Manufacturer: Rudolph
Description:  The FE III-D's advanced Focused Beam™ system uses dual wavelength technology to directly measure the sample with a small spot at multiple angles of incidence and at multiple wavelengths. This allows the system to define more variables, increasing the certainty of the results on complex multi-layer films.
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KLA-Tencor Alpha Step 500 Profilometer

Equipment: KLA-Tencor Alpha Step 500 Profilometer
Manufacturer: KLA-Tencor / ADE , KLA-Tencor , KLA-Tencor Equipment
Description:
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KLA-Tencor SP1 Classic with single 200mm open cassette or single 300mm foup

Equipment: KLA-Tencor SP1 Classic with single 200mm open cassette or single 300mm foup
Manufacturer: KLA-Tencor
Description:  300/200mm wafers Dual Dark Field Collection Channels 0.079um Defect Sensitivity 0.001 ppm Haze Sensitivity Argon Ion Laser (488nm) Measurement Chamber with ULPA Filter and Blower Unit Operator Interface : MS Windows NT 4.0 OS, Ver 3.2 Software Interactive Pointing Device, Keypad controls TFT Flat Panel Display Parallel Printer Port Defect Map and Histogram with Zoom Micro View Measurement Capability Clear Side Panels for Wafer Environment Protection Cassette Size recognition Ulpa Filter and Blower Unit for Wide Handling Module for class 1 Feature X-Y Coordinates System refurbished to meet OEM Specification and Calibrated System is completely refurbished, calibrated and set up to run 8" wafer. 
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KLA Tencor RS35C Resistivity Mapping System

Equipment: KLA Tencor RS35C Resistivity Mapping System
Manufacturer: KLA-Tencor Equipment
Description:
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Ultratech 1500 Big Field Projection Stepper

Equipment: Ultratech 1500 Big Field Projection Stepper
Manufacturer: Ultratech
Description:  An electronic focus system which permits more accuracte and repeatable substrate positioning in the focal plane, allowing the system to print 0.1um and 0.8um resolution geometry in a production mode.
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KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System

Equipment: KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System set up for 200mm Edge Grip Handler. Cassette Open Handler System/SMIF/Dual Cassette. System refurbished to meet OEM Specifications.
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KLA-Tencor UV-1070 Thin Film Measurement System

Equipment: KLA-Tencor UV-1070 Thin Film Measurement System
Manufacturer: KLA-Tencor , KLA-Tencor Equipment
Description: KLA-Tencor UV-1070 Thin Film Measurement System refurbished to meet OEM Specifications
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