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KLA-Tencor OmniMap RS100 Resistivity Mapping System

Equipment: KLA-Tencor OmniMap RS100 Resistivity Mapping System
Manufacturer: KLA-Tencor Equipment
Description:

 With the ability to measure materials such as polysilicon, copper, and bulk silicon substrates.

System capable of running 200mm and 300mm wafers.


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KLA-Tencor 5100XP Overlay Measurement System

Equipment: KLA-Tencor 5100XP Overlay Measurement System
Manufacturer: KLA-Tencor Equipment
Description:

The KLA-Tencor 5100 XP system is a metrology tool which performs Overlay (misregistration), CD (optional), and Height measurements(optional) automatically on thin film semiconductor wafers. Measurements are made in three dimensions based on the Coherence Probe Metrology (CPM) technology.


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KLA-Tencor Surfscan 6400 Film Surface Analysis System

Equipment: KLA-Tencor Surfscan 6400 Film Surface Analysis System
Manufacturer: KLA-Tencor Equipment
Description:

KLA-Tencor 6400 Surfscan film surface analysis system for detection of contaminating particles. Detects contaminating partciles on all surfaces even rough surfaces. Small particles on dielectrics, polysilicon, backside silicon and rough metal films can be detected and particles as small as 0.12 micro-meters can be located on polished silicon and epitaxial layers.


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KLA-Tencor 5200 Overlay Inspection System

Equipment: KLA-Tencor 5200 Overlay Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

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KLA-Tencor 6200 Surfscan Analysis System

Equipment: KLA-Tencor 6200 Surfscan Analysis System
Manufacturer: KLA-Tencor Equipment
Description:

 Wafer surface contamination analyzer for unpatterned wafers.


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KLA-Tencor AIT I (8020)

Equipment: KLA-Tencor AIT I (8020)
Manufacturer: KLA-Tencor Equipment
Description:

A double darkfield patterned wafer inspection tool.


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KLA-Tencor Surfscan 7600 Particle Inspection System

Equipment: KLA-Tencor Surfscan 7600 Particle Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

 A particle inspection tool - capable of up to 200mm wafers.


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KLA-Tencor Surfscan 7700 Wafer Inspection System

Equipment: KLA-Tencor Surfscan 7700 Wafer Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

A patterned and unpatterned wafer inspection and can accommodate wafers between 4" to 8".


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KLA-Tencor 6100 Surfscan Analysis System

Equipment: KLA-Tencor 6100 Surfscan Analysis System
Manufacturer: KLA-Tencor Equipment
Description:

Unpatterned wafer surface contamination analyzer


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KLA-Tencor UltraPointe CRS1010 Defect Review Station

Equipment: KLA-Tencor UltraPointe CRS1010 Defect Review Station
Manufacturer: KLA-Tencor Equipment
Description:

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KLA-Tencor P20H Long Scan Profiler

Equipment: KLA-Tencor P20H Long Scan Profiler
Manufacturer: KLA-Tencor Equipment
Description:

Long scan profiler measurement tool.


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KLA-Tencor AIT I In-Line Defect Inspection System

Equipment: KLA-Tencor AIT I In-Line Defect Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

Automated full water inspection system for detecting particles as small as 0.10 micrometers on bare silicon and patterned process wafers


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KLA-Tencor FleXus FLX-2300

Equipment: KLA-Tencor FleXus FLX-2300
Manufacturer: KLA-Tencor Equipment
Description:

 Thin-film stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film.


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KLA-Tencor Surfscan 5500 Surface Particle Inspection Analyzer

Equipment: KLA-Tencor Surfscan 5500 Surface Particle Inspection Analyzer
Manufacturer: KLA-Tencor Equipment
Description:

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KLA-Tencor FleXus FLX 2320

Equipment: KLA-Tencor FleXus FLX 2320
Manufacturer: KLA-Tencor Equipment
Description:

 Thin-film stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film.


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KLA-Tencor Surfscan 6420 Inspection System

Equipment: KLA-Tencor Surfscan 6420 Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

KLA-Tencor Surfscan 6420 Inspection System, a surface inspection tool for unpatterned wafers. It accommodates wafer sizes: 100, 125, 150, and 200mm (round or rectangular substrates). The 6420 is a film surface analyzer System detects sub micron particles on polysilicon, tungsten, epitaxial and polished silicon.


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KLA-Tencor P-10 Surface Profiler

Equipment: KLA-Tencor P-10 Surface Profiler
Manufacturer: KLA-Tencor Equipment
Description:

A computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.


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KLA-Tencor 2131 Defect Inspection System Upgraded to 2132

Equipment: KLA-Tencor 2131 Defect Inspection System Upgraded to 2132
Manufacturer: KLA-Tencor Equipment
Description:

 The KLA-Tencor 2132 is a wafer defect inspection system.


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KLA-Tencor Model AIT XP Darkfield Inspection System

Equipment: KLA-Tencor Model AIT XP Darkfield Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

The KLA-Tencor AIT XP+ Patterned Wafer Inspection system is designed to meet the needs of 0.13um and beyond design rule processes. Based on the highly popular AIT series, the AIT XP+ incorporates Mixed Mode Detectors with Adaptive Mode for increased defect detection and sensitivity. Able to process both 200mm (8”) and 300mm (12”) wafers, the AIT XP+ allows for accelerated 300mm yield learning and faster production ramp. Significant Cost of Ownership (CoO) improvements are realized with the sensitivity enhancements achieved with Adaptive Mode that allow for spot size migration.


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KLA-Tencor HRP 320 High Resolution Profiler

Equipment: KLA-Tencor HRP 320 High Resolution Profiler
Manufacturer: KLA-Tencor Equipment
Description:

HRP (High Resolution Profiler) series from KLA-Tencor provides a comprehensive automated surface metrology solution for in-line process control of CMP and etch.

 


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KLA-Tencor 6220 Surfscan

Equipment: KLA-Tencor 6220 Surfscan
Manufacturer: KLA-Tencor Equipment
Description:

 This tool detects, counts, and sizes defects


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KLA-Tencor 7700 Wafer Inspection System (M)

Equipment: KLA-Tencor 7700 Wafer Inspection System (M)
Manufacturer: KLA-Tencor Equipment
Description:

 Patterned / Unpatterned wafer inspection system.


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KLA-Tencor UV-1050 Thin Film Measurement System

Equipment: KLA-Tencor UV-1050 Thin Film Measurement System
Manufacturer: KLA-Tencor Equipment
Description:

The UV-1050's field-proven pattern recognition, extensive analysis software, and high reliability add up to an advanced thin film measurement tool with the lowest cost of ownership in its class.

Inventory:

  • Two newly refurbished and ready to go
  • No warranty

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KLA-Tencor SP1-TBI Unpatterned Surface Inspection System

Equipment: KLA-Tencor SP1-TBI Unpatterned Surface Inspection System
Manufacturer: KLA-Tencor Equipment
Description:

KLA-Tencor's SP1 configured with KLA-Tencor's Trible-Beam Illumination (TBI).


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KLA-Tencor RS55TC

Equipment: KLA-Tencor RS55TC
Manufacturer: KLA-Tencor Equipment
Description:

 OmniMap Four Point Probe Resistivity Mapping System 


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KLA-Tencor Alpha Step 500 Profilometer

Equipment: KLA-Tencor Alpha Step 500 Profilometer
Manufacturer: KLA-Tencor Equipment
Description:

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KLA Tencor RS35C Resistivity Mapping System

Equipment: KLA Tencor RS35C Resistivity Mapping System
Manufacturer: KLA-Tencor Equipment
Description:

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KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System

Equipment: KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System
Manufacturer: KLA-Tencor Equipment
Description:

KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System set up for 200mm Edge Grip Handler. Cassette Open Handler System/SMIF/Dual Cassette. System refurbished to meet OEM Specifications.


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KLA-Tencor UV-1070 Thin Film Measurement System

Equipment: KLA-Tencor UV-1070 Thin Film Measurement System
Manufacturer: KLA-Tencor Equipment
Description:

KLA-Tencor UV-1070 Thin Film Measurement System refurbished to meet OEM Specifications


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KLA-Tencor 2135 Defect Wafer Inspection System with KLA-Tencor 2552 Review Station

Equipment: KLA-Tencor 2135 Defect Wafer Inspection System with KLA-Tencor 2552 Review Station
Manufacturer: KLA-Tencor Equipment
Description:

KLA-Tencor 2135 Defect Wafer Inspection System  

  • System capable up for processing 200mm wafers
  • Low contact chuck
  • Pentium CPU with Windows NT Installed
  • NT box option-direct link/direct SECS
  • SECS II/GEM Communication Interface Capable
  • Mercury Xenon Lamp
  • Light level sensor with adjustable 2x Mag Tubes
  • X/Y/Z drive/controller chassis and motion controller card
  • High voltage electronics
  • Granite stage
  • Autofocus III with 200mm Collimating Lens
  • Remote Power Distribution Panel
  • Wafer handling module
  • Cassette ergo loaders

With:

KLA-Tencor 2552 Review Station

  • 90Mhz Pentium CPU
  • 128 MB RAM
  • 2.1 GB Disk Storage 
  • 19" Color User Interface Monitor
  • 17" Color Defect Image Monitor
  • Thin-wire Ethernet Interface
  • Hardware for Image Digitization
  • Four (4) Isolated and Four (4) Non-Isolated RGB Video Inputs  
  • Multi-user UNIX Operating System
  • Relational Database for Defect Data and Images 
  • Window-Based User Interface 
  • KLA Defect Analysis Applications Software  
  • KLA Database Management Utilities 

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KLA-Tencor Flexus FLX-5500 Automatic Thin Film Stress Measurement System

Equipment: KLA-Tencor Flexus FLX-5500 Automatic Thin Film Stress Measurement System
Manufacturer: KLA-Tencor Equipment
Description:

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KLA-Tencor P-2 Long Scan Profilometer

Equipment: KLA-Tencor P-2 Long Scan Profilometer
Manufacturer: KLA-Tencor Equipment
Description:

High sensitivity, long scan surface profiler measuring roughness, waviness and step height. Refurbished by SPEC Equipment to meet all OEM refurbishment requirements.


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