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GaSonics Legacy

GaSonics AE2001 Etch System

Equipment: GaSonics AE2001 Etch System
Manufacturer: GaSonics
Description:

Microwave downstream etcher. 


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GaSonics 7104

Equipment: GaSonics 7104
Manufacturer: GaSonics
Description:

The 7100 Series is the most popular of the GaSonics International industrial batch treatment and cleaning systems. This full-featured system is based on proven reactor features and system drivers developed over the past twenty years.

The GaSonics tool is a batch plasma system. Processing is accomplished at low temperature, and is used for surface treatment, descum, and cleaning organic material such as photoresist from metal, silicon, and other assemblies.


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GaSonics AE-2000LL Isotropic Etcher

Equipment: GaSonics AE-2000LL Isotropic Etcher
Manufacturer: GaSonics
Description:

The GaSonics Aura Loadlock Isotropic Etcher (AE-2000LL) is a microprocessor-controlled down-stream etcher that etches the font, and optionally, the backside of a wafer. The AE-200LL uses a dual-pumping loadlocked system with a heated split-pattern design, wafer transport arms and wafer storage elevators. The AE-2000LL can be used with wafers of 5-8 inch with only minor hardware modifications.


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GaSonics Aura 3010 Photoresist Asher with SMIF

Equipment: GaSonics Aura 3010 Photoresist Asher with SMIF
Manufacturer: GaSonics
Description:

A downstream photoresist removal system. A damage-free asher with closed loop temperature control. 5 - 8 inch (125mm-200mm) wafer capability. This tool comes with optional integrated SMIF by Asyst.


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GaSonics L3500

Equipment: GaSonics L3500
Manufacturer: GaSonics
Description:

The GaSonics/IPC L3500 asher is a versatile system, designed for clean, damage-free removal of the most difficult resist structures. Using the production proven L3300 platform, the L3500 improves throughput and has a wide process window die to its patented large diameter microwave plasma source.


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GaSonics Aura 2000LL Photoresist Asher

Equipment: GaSonics Aura 2000LL Photoresist Asher
Manufacturer: GaSonics
Description:

The GaSonics Aura 2000-LL Asher is a single wafer load locked system, designed to address the demands for ultra clean, damage free photoresist removal.


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GaSonics IPC Series 9104 Plasma Asher

Equipment: GaSonics IPC Series 9104 Plasma Asher
Manufacturer: GaSonics
Description:

The GaSonics 9104 is a plasma asher from the GaSonics IPC series.


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