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ASYST

Asyst LPT-2200 SMIF Pod

Equipment: Asyst LPT-2200 SMIF Pod
Manufacturer: ASYST
Description:

Portable SMIF pod that can accompany any cassette to cassette processing system.


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ASYST VersaPort 2200

Equipment: ASYST VersaPort 2200
Manufacturer: ASYST
Description:

The VersaPort 2200 is a 200mm class load port for presenting wafers on reticles to the process tool while maintaining better-than-Class 1 cleanroom environment for the substrate.


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