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AG Associates Heatpulse 410

Description:

Rapid thermal processor with a 2 - 5" wafer capability.


Features:
  • Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
  • PC Control capability
Specifications:
  • Steady state temperature range: 400°C - 1200°C
  • Stready state temperature stability: (+ or -)  7°C
  • Heating rate: 150°C per second
  • Cooling rate: temperature dependent - max 150°C per second
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