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AG Associates 4100 Heatpulse

Description:

Rapid Thermal Processor System with Single Wafer Processing capability up to 6" Wafers.


Features:
  • System to Include a 6-Gas Panel Precise Temperature / Time Control
  • Multiple Cycle Processing
  • Full SECS II Capability
Specifications:
  • Steady State Temperature Range 400 to 1150°C
  • Steady State Process Time Programmable : 0-600 Sec

 

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