SPEC Equipment’s Factory-Trained Service & Support

SPEC Equipment services provide second source services, spares, and technical support to the semiconductor fabrication marketplace. Our certified technicians remanufacture and refurbish equipment back to the original manufacturer’s specifications, or we can provide custom engineering and upgrades to meet your needs.

Services Available:

• Refurbishment and remanufacture
• Technical service and support
• Installation and Start Up
• Calibration or recalibration
• Replacement parts

Other Services:

• Onsite training
• Service contracts and warranties
• 24-hour response time & hotline for troubleshooting
• 48-hour onsite response
• Rapid turn-around time on all parts delivery

Processes We Specialize In:

• Metrology
• Ash and Etch – descum
• Photolithography

Key Manufacturers:

• GaSonics
• KLA-Tencor
• ADE
• Suss MicroTec / Karl Suss