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GaSonics 3510EPC / GaSonics L3510E

GaSonics L3510E Isotropic Etch System

Equipment: GaSonics L3510E Isotropic Etch System
Manufacturer: GaSonics
Description:

The GaSonics L3510E is a high etch rate, downstream isotropic etching system, designed to provide isotropic profiles along with the ability to etch or ash at low temperatures. Utilizing the proven L-Series 3510 platform, the etch system also uses the downstream microwave sources and applicator. With excellent process controls, the 3510E provides a wide range of process capabilities and applications. The system also includes a topside lamp option for heating the substrates in a “pins up” mode. The “pins up” mode allows backside etching of various materials.


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SPEC 3510E PC Isotropic Etch System

Equipment: SPEC 3510E PC Isotropic Etch System
Manufacturer: GaSonics
Description:

SPEC Equipment has developed the new GaSonics L3510E PC isotropic etching system. Designed for high etch rates, the 3510 PC provides isotropic profiles along with the ability to etch or ash at low temperatures. The new PC interface utilizes the proven L-Series 3510 process hardware, while replacing the legacy electronics and components. These new modernizations include a newly designed contemporary control system; color Graphic User Interface, real time graphing and saved data recall. With excellent process controls and proven downstream microwave source, the 3510E PC provides a wide range of process capabilities and applications. The system also includes a topside lamp option for heating the substrates in a “pins up” mode. The “pins up” mode allows backside etching of various materials.   


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SPEC 3510E PC Isotropic Etch System

Equipment: SPEC 3510E PC Isotropic Etch System
Manufacturer: GaSonics
Description:

SPEC Equipment has developed the new GaSonics L3510E PC isotropic etching system. Designed for high etch rates, the 3510 PC provides isotropic profiles along with the ability to etch or ash at low temperatures. The new PC interface utilizes the proven L-Series 3510 process hardware, while replacing the legacy electronics and components. These new modernizations include a newly designed contemporary control system; color Graphic User Interface, real time graphing and saved data recall. With excellent process controls and proven downstream microwave source, the 3510E PC provides a wide range of process capabilities and applications. The system also includes a topside lamp option for heating the substrates in a “pins up” mode. The “pins up” mode allows backside etching of various materials.  


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