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Fusion 200 PCU Photostabilization System

Equipment: Fusion 200 PCU Photostabilization System
Manufacturer: Fusion
Description:

A photostabilizer with a fully automated, stand-alone, system for unicassette processes. Allows wafer sizes: 100mm to 200mm.


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Fusion 150 PC Photostabilization System

Equipment: Fusion 150 PC Photostabilization System
Manufacturer: Fusion
Description:

A photostabilization system with 4" to 6" wafer capability. It's a cost-effective, one-step solution for photoresist stabilization of 75-150mm wafer substrates.

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