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Canon PLA 501F Parallel Light Mask Aligner

Equipment: Canon PLA 501F Parallel Light Mask Aligner
Manufacturer: Canon
Description:
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CHA Industries Mark 50 Source Evaporator

Equipment: CHA Industries Mark 50 Source Evaporator
Manufacturer: CHA Industries
Description: Full computer control to manual operation. Chamber 32" diameter by 32" long process. Dual operation, sputtering and evaporation.
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CHA Industries SE 1000 E-Beam Evaporation System

Equipment: CHA Industries SE 1000 E-Beam Evaporation System
Manufacturer: CHA Industries
Description: An evaporation system with a 25.5 inch diamater stainless steel water cooling chamber. Also features a 6 pocket Telemark E Gun 15CC.
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CHA Industries SE 600 E-Beam Evaporator

Equipment: CHA Industries SE 600 E-Beam Evaporator
Manufacturer: CHA Industries
Description: An electron beam evaporation system with a 4 pocket E-gun.
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Dektak 3030 Surface Profiler

Equipment: Dektak 3030 Surface Profiler
Manufacturer: Dektak
Description: Measures vertical features ranging in height from 131 micron to 50 angstroms on a variety of substrate surfaces.
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Dektak IIA (Sloan)

Equipment: Dektak IIA (Sloan)
Manufacturer: Dektak
Description: Surface Profile Measuring System, Capability up to 6".
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Electroglas Xynetics 1034X Wafer Prober with Station

Equipment: Electroglas Xynetics 1034X Wafer Prober with Station
Manufacturer: Electroglas/Xynetics
Description: This tool is designed to provide a high throughput capacity. It features a temptronics 4 inch thermal Chuck and Miller temperature controller.
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Evergreen SSEC 50XP Cleaner

Equipment: Evergreen SSEC 50XP Cleaner
Manufacturer: Evergreen
Description: This single-sided cleaner is a fully automatic machine designed to scrub, rinse, and spin dry carriers. It's a PC-controlled tool that can store multiple programs with multiple events.
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Evergreen SSEC M10 Cleaner

Equipment: Evergreen SSEC M10 Cleaner
Manufacturer: Evergreen
Description: This single-sided cleaner is a fully automatic machine designed to scrub, rinse, and spin dry carriers. The carriers are loaded manually onto the vacuum fixture. PC-controlled tool can store multiple programs with multiple events.
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Fluoroware HTC 4000 Cassette/Box Washer

Equipment: Fluoroware HTC 4000 Cassette/Box Washer
Manufacturer: Fluoroware
Description: A stainless steel, dual action peripheral cleaning system. It is capable of 2" to 8" wafer cassettes and cassette holders.
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Fusion 200 PCU Photostabilization System

Equipment: Fusion 200 PCU Photostabilization System
Manufacturer: Fusion
Description: A photostabilizer with a fully automated, stand-alone, system for unicassette processes. Allows wafer sizes: 100mm to 200mm.
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GaSonics 7104

Equipment: GaSonics 7104
Manufacturer: Branson IPC , GaSonics , GaSonics Legacy
Description: The 7100 Series is the most popular of the GaSonics International industrial batch treatment and cleaning systems. This full-featured system is based on proven reactor features and system drivers developed over the past twenty years. The GaSonics tool is a batch plasma system. Processing is accomplished at low temperature, and is used for surface treatment, descum, and cleaning organic material such as photoresist from metal, silicon, and other assemblies.
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