- Karl Suss MA200 (2” to 200mm Wafer Size)
- Karl Suss MA150 (2” to 150mm Wafer Size)
- Karl Suss MA56 (2” to 100mm Wafer Size)
The Karl Suss MA150 & 200 are the next generation of production full-field lithography systems. The Karl Suss MA150 & 200 production aligner platform offers a higher overlay accuracy, more flexible wafer handling including reject and buffer cassette option and SECS II/GEM functionality (Note: the MA56 is the first generation of the MA Series some features and benefits may not ably)
Features and Benefits
- Resolution: 3 µm (proximity) 0.8-1µm (vacuum contact)
- Alignment Accuracy: 0.5µm (Direct Align)
- Bottomside alignment (optional)
- Throughput: > 100 wph (including auto-alignment)
- Run-Out Compensation
- Full-field intensity up to >75mW/cm2
- Quick wafer size conversion
- Reliable handling of warped wafers
- Robot handling unit (Reject cassette option)
- Small footprint
- Windows Graphical User Interface
Note: SPEC follows all Karl Suss refurbishment procedures and uses qualify Karl Suss vendors.
SPEC follows all Karl Suss refurbishment procedures and uses experienced and qualified Karl Suss vendors.
How may we help you? Contact us today to discuss your service needs or to request a price quote. |
