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Quality remanufacture and service of Karl Suss and other photolithography equipment

SPEC specializes in Karl Suss photolithography equipment.
SPEC can calibrate, repair, refurbish or even rebuild many Karl Suss models to meet OEM specifications.

SPEC is the most experienced Mask Aligner Company in the United States with in depth knowledge of the following Karl Suss tools:
MJB3, MA4, MA6, MA/BA6, MA6-NFH, MA8, MA8/BA6, MJB21, MA24, MA25, MJB55, MA56, MA56.5, MA150, MA200, SB6

Our fully refurbished photolithography tools provide guaranteed performance at exceptional value.

In addition to high-quality pre-owned tools, SPEC also offers system software and hardware performance upgrades to extend the capabilities of existing equipment.

SPEC Services provides second source services, spares, and technical support to the semiconductor fabrication market.

Karl Suss Remanufacture Procedure
Clean/calibrate wafer alignment stage
Clean/calibrate wedge error compensation head
Clean/calibrate wafer transport assembly
Clean/calibrate pre-aligner assembly
Clean/calibrate microscope assembly
Clean/replace exposure optics
Calibrate all PCB’s
Calibrate UV lamp power supply
Replace UV lamp
Replace UV lamps anode/cathode wire
Replace pneumatic hoses
Replace relays
Adjust all pneumatic regulators/throttles
Refinish all machine covers
Verify all system functions
Refinish all machine covers

Karl Suss Service & Sales

Spec Equipment Corp. is an alternative source for Karl Suss and other Lithography systems found on most Semiconductor fabs.

We provide high quality remanufacture of the Suss MicroTec Product lines. Our fully refurbished Karl Suss tested tools provide guaranteed performance at exceptional value.

Spec Equipment Corp. Services provides second source services, spares, and technical support to the semiconductor fabrication marketplace.

We specialize in:

  • field service
  • support
  • calibration and maintenance

We also provide parts, parts repair or exchange for Obsolete Karl Suss Lithography Equipment.

How may we help you? Contact us today to discuss your service needs or to request a price quote.

 

Karl Suss Technical Specifications

MA468 Series

MA56-150-200 Series

MJB Series


 

See our Karl Suss equipment available for purchase

See all of our photolithography equipment available for purchase