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Non-Pattern Units
Surfscan 4000, 5000, 6000, SP1, and SP1 TBI Series 2
Pattern Units
Surfscan 7000 and AIT Series
The Surfscan Series is designed for detecting, counting and sizing particles, pits and scratches on bare wafers and wafers deposited with smooth blanket films, and for measuring haze on a broad range of surfaces. The system's patented optical design and advanced digital signal processing techniques ensure exceptional sensitivity. Surfscan Series platform offers superior performance, low cost of ownership, and high throughput.
SPEC follows all KLA/Tencor refurbishment procedures and uses qualified technicians
| Install New Laser |
| Clean or Replace Optics and Mirrors |
| Refurbish Load Arm |
| Refurbish Cassette Elevators and Re-Anodize Plates (Complete wafer handling/mechanical motion: operate without error) |
| All Shuttle, Sort-cam, Indexer's Lead screws clean and lubricate |
| Refurbish Monitor or Replace |
| Refurbish All Wiring or Replace |
| Refurbish All Switches or Replace |
| Secure all hardware |
| Verify and adjust DC powers |
| Complete Optics alignment as necessary to meet the specification |
| System calibrated to OEM specifications. System calibration: ensure system has calibrated to meet the original specification. |
| Skins/panels will be anodized or repainted with particle free paint |
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See our inventory KLA-Tencor equipment for purchase |
