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Tencor Alpha Step Series
Tencor P Series
The KLA-Tencor Alpha Step & P Series these surface
profiler systems are used for step heights etch depths,
coating thickness, micro roughness and a variety of
precision surface characteristics.
SPEC follows all KLA/Tencor refurbishment procedures
and uses qualify KLA/Tencor technicians.
| SPEC Refurbishment Procedures |
| Clean and lubricate
X-, Y-, Theta-axis Lead-screws and Reference flat |
| Lubricate and level
scan stage |
| Calibrate stylus
force |
| Clean and alignment
optics |
| Verify and adjust
all DC powers to OEM |
| Re-Anodize Stage |
| Verify and adjust
all DC powers to OEM |
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Re-Anodize Stage
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| Refurbish all wiring
or replace |
| Refurbish monitor
or replace |
| Skins/panels will
be anodized or repainted with particle free paint. |
| EPO Test |
| Refurbish All Switches
or Replace |
| Refurbish All Wiring
or Replace |
| System calibrated
to OEM specifications. System calibration: ensure
system has calibrated to meet the original specification. |
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See
our inventory KLA-Tencor equipment for purchase |
