|
Tencor Alpha Step Series
Tencor P Series
The KLA-Tencor Alpha Step & P Series these surface profiler systems are used for step heights etch depths, coating thickness, micro roughness and a variety of precision surface characteristics.
SPEC follows all OEM procedures and uses qualify KLA/Tencor technicians.
| SPEC Refurbishment Procedures |
| Clean and lubricate X-, Y-, Theta-axis Lead-screws and Reference flat |
| Lubricate and level scan stage |
| Calibrate stylus force |
| Clean and alignment optics |
| Verify and adjust all DC powers to OEM |
| Re-Anodize Stage |
| Verify and adjust all DC powers to OEM |
|
Re-Anodize Stage |
| Refurbish all wiring or replace |
| Refurbish monitor or replace |
| Skins/panels will be anodized or repainted with particle free paint. |
| EPO Test |
| Refurbish All Switches or Replace |
| Refurbish All Wiring or Replace |
| System calibrated to OEM specifications. System calibration: ensure system has calibrated to meet the original specification. |
|
|
See our inventory KLA-Tencor equipment for purchase |
