Single Wafer
75-150 Millimeter
The GaSonics Aura 1000 single-wafer photoresist asher is an automated tool designed as a flexible downstream plasma photoresist removal system for high-volume wafer fabrication. The Aura was developed in direct response to manufacturer’s concern about wafer sensitivity to processing damage, reliability, and low cost of ownership.
Features
- Lowest cost of ownership asher, > 95% uptime, 320 systems in production
- High throughput
- Very small footprint: 80cm (32”) Width x 80cm (32”) Length x 70cm (28”) Height
- Front and backside isotropic removal
- Downstream ashing for minimized device damage
- 75mm-1500mm wafer capability
- Pick and place wafer handling
- Precise endpoint detection
- Up to 4 MFC’s
- Pressure control, option
- SMIF compatible
- SECS II interface, multiple process step capability
- Variable lamp heating for temperature control
- Table top or floor/through the wall designs
Product Specifications
| Process |
| Pressure 1.75 to 2.5 Torr
|
| Microwave 1000 watts |
| Gas Flow O2 4.5 SLPM |
| Gas Flow N2 0.45 SLPM |
| Lamp Time (variable) 0-18 sec. |
| Temperature (variable) 150-300°C (typical) |
| Results |
| Ash Rates 2µ-5µ/min. positive photoresist
|
| >8µ/min. negative photoresist |
| Uniformity ± 5-20% |
| Selectivity to Underlying Films >1000:1 |
| Throughput Up to 90 wph |
| Particle Control <0.05 p/cm2 0.3µ |
| Damage Control <0.IV CV-shift for 250Å gate oxide |
| Process |
| Pressure 1.75 to 2.5 Torr |
| Microwave 1000 watts |
| Gas Flow O2 4.5 SLPM |
| Gas Flow N2 0.45 SLPM |
| Lamp Time (variable) 0-18 sec. |
| Temperature (variable) 150-300°C (typical) |
| All electronics thoroughly tested for full functionality bad components replaced |
| Replace all tubing |
| System covers stripped & repainted with particle-free paint |
| Process |
| Pressure 1.75 to 2.5 Torr |
| Microwave 1000 watts |
| Gas Flow O2 4.5 SLPM |
| Gas Flow N2 0.45 SLPM |
| Lamp Time (variable) 0-18 sec. |
| Temperature (variable) 150-300°C (typical) |
| All electronics thoroughly tested for full functionality bad components replaced |
| Replace all tubing |
| System covers stripped & repainted with particle-free paint |
How may we help you? Contact us today to discuss your service needs or to request a price quote.
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