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GaSonics is the industry leader in low-cost ashing and etching systems. SPEC can support your reliable GaSonics equipment in the field by providing upgrades, re-maufacturint or re-tooling.
We adhere to the highest equipment re-furbishment standards. We follow all GaSonics documentation and procedures for the rebuild process. And we use qualified GaSonics parts and services in our rebuilds.
| GaSonics Services |
| Audits |
| Installations & De-installations |
| Operator & Maintenance Training |
| Per Call Service |
| Full Time/Part Time On Site Service |
| Preventative Maintenance |
| Telephone Technical Support |
| Remanufacturing process as follows: (Note Spec Equipment follows all GaSonics rebuild procedures and uses qualified GaSonics vendors) |
| Chamber is stripped and re-anodized |
| Replace all Quartz |
| Replace chamber windows |
| Refurbish Cassette Elevators and Re-Anodize Plates( Complete wafer handling / mechanical motion: operate without error) |
| Refurbish Load Arm |
| Waveguide is rebuilt or replaced |
| MFC's and Baratron are cleaned and re-calibrated |
| Replace Lamps |
| MKS throttle valve & controller re-calibrated or replaced |
| All Electronics and wiring are thoroughly tested and repaired or replaced |
| All Consumable parts are replaced with new |
| Refurbish all switches or replace |
| 4 MFC's capability ( System includes 2 MFC's calibrated to customer gas specifications) |
| All outer covers are stripped and repainted with particle free paint |
| Options: |
| System upgraded with PC Based Controller and software upgrade: Process data acquisition, analysis, comprehensive calibration and diagnostic functions |
We also provide parts, parts repair or exchange for Obsolete GaSonics and other ashing and etching systems.. Gasonics Aura 1000 , Gasonics A1000 , GaSonics A1000 , Gasonics Aura1000 , Gasonics 2000LL , Gasonics AE2001 , Gasonics AE2000LL , Gasonics L3510
How may we help you? Contact us today to discuss your service needs or to request a price quote.
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See our inventory of GaSonics equipment available for purchase |
