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SPEC Equipment has developed the new and improved computer based system for the GaSonics Aura 1000 plasma ashing system.

GaSonics Aura 1000 Features/Specifications:

• Pentium PC control interface
• Touch screen GUI interface with keyboard and mouse
• Closed loop wafer temperature control
• Ethernet connection
• Advanced diagnostics
• Flexible wafer handling from 75mm-150mm
• High throughput
• Very small footprint: 80cm (32") w, 80cm (32"), 170 (28") h
• Front and backside isotropic removal
• SMIF compatible
• SECS II interface with multiple process step capability

For more information about this tool, take a look at our brochure here.