Suss MicroTec / Karl Suss
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We offer system software and hardware performance upgrades as well as parts, parts repair and exchanges for obsolete Suss MicroTec / Karl Suss lithography equipment.
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SPEC Equipment works with the following Suss MicroTec / Karl Suss tools:
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· Karl Suss MJB3 · Karl Suss MJB4 · Karl Suss MA6 · Karl Suss MA6/BA6 |
· Karl Suuss MA8/BA6 · Karl Suss MJB21 · Karl Suss MA24 · Karl Suss MJB55 |
· Karl Suss MA56 · Karl Suss MA150 · Karl Suss MA200 |
Our field support and maintenance services are unmatched in the semiconductor marketplace. SPEC Equipment’s professional service engineers have more than 25 years of combined experience with Suss MicroTec / Karl Suss equipment, ensuring the best service available on the market for these systems!
Equipment: Karl Suss MJB3 Aligner Exposure System
Manufacturer: Suss MicroTec / Karl Suss
Description:
The MJB-3s are suitable for handling wafers up to 3 inches in diameter and can be used for other samples.
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Equipment: Karl Suss MJB-55
Manufacturer: Suss MicroTec / Karl Suss
Description:
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Equipment: Karl Suss MA200CC Mask Aligner Exposure System
Manufacturer: Suss MicroTec / Karl Suss
Description:
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Equipment: Karl Suss MA8
Manufacturer: Suss MicroTec / Karl Suss
Description:
The SUSS MA8 is the system solution for lithography in R & D on substrate sizes up to 200 mm. Widely employed in development and pilot production of IC backend processes, the MA8 also provides full laboratory mask aligner versatility and flexibility. The compatibility of the exposure modes allows processes to be developed on the MA8 which can then be run in production on any of the SUSS MA200 production mask aligners.
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