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System Consist of:

Set up for 3 ea Delta cathodes , 2 blanks and 1 Delta to round adapter currently in system,load lock production sputtering system, Balzers TPH 170 turbo w/ TCP 300, controller on load lock , CTI CryoTorr 8 w/ purge gas heater, CTI SCW compressor ( water cooled), Advanced Energy RFG 1250 RF power supply 13.56 MHz, Advanced Energy RFG RF control, Advanced Energy MDX 10K DC power supply, Advanced Energy MDX 052 DC power supply mini control panel, Granville Phillips 307 control, Ion w/2 convectron,National Instruments SCXI 1001 PLC control Rack mount industrial computer, Table speed control, MKS 247-4, 4channel MFC control, MKS 600 series throttle valve control, 6 Proteus water flow switches, ( target water, table , chamber , etc.),