Coating - Positive, Negative, Polyimide, Polymers, adhesives, etc.  

Positive Develop - Flat fan spray, puddle, Atomized-aspiration and Ultrasonic

Solvent Develop - Atomized-Aspirated

Cleaning - High pressure Jet spray &/or brush scrub

Bake - Cassette to cassette and Stand Alone. Ambient to 450°C.

Chill (cooling) plates. Water jacket and thermoelectric junction devices.

HMDS Vapor Prime:   Stand alone and in-line cassette to cassette systems.

NH₃ Image Reversal -   Stand alone and in-line cassette to cassette systems.

UV in line Cure for image reversal. Flood exposure of  wafer at >200mJ/cm²  .

Metal Lift-off - Semi-automatic and cassette to cassette.

Horizontal Quartz Cleaners for cleaning Horizontal tubes, horizontally.

Vertical Quartz Cleaners for cleaning Horizontal tubes, vertically.

Vertical Quartz Tube Cleaners

Quartz Bell Jar cleaners