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CHA Industries Mark 50 Source Evaporator Features/Specifications
- Chamber 32" diameter by 32" long process
- Single four pocket E-Gun model number EB-2(4-25cc)
- N2 trap
- CTI Cryo 400 pump
- 16kW heat
- 3 planet tooling for 4"
- 10kva power supply
- D65 Leybold M.P.
- Maxtek 260 dep. controller
- Fully automatic control
- Water cooling
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