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These BOC Edwards QDP40 QDP 40 Dry Vacuum Pump QMB 250 QMB 250 Dry Booster Blower System "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.

The pump specifications are as follows.

Maximum Continuous Inlet Pressure
20 mbar

Typical Shaft-Seal Nitrogen Flow
7 slm

Warm-Up Time
15 min

Inlet Connection
QDP 40: ISO 40
QMB 250: ISO 63 bolted

Outlet Connection
QDP 40: NW40
QMB 250: NW40

Oil Capacity
QDP Pump 0.4 liters
QMB 250, coupling cover 1.5 liters
QMB 250, shaft-seal reservoir 0.13 liter

Peak Speed
290 m³h^-1
171 ft³min^-1

Displacement
375 m³h^-1
221 ft³min^-1

Ultimate Vacuum
2 x 10^-3 mbar
1.5 x 10^-3 Torr

Quanity Avalible - 4