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The 7100 Series is the most popular of the GaSonics International industrial batch treatment and cleaning systems. This full-featured system is based on proven reactor features and system drivers developed over the past twenty years.
The exclusive 7100 design is based on production experience and user feedback from thousands of systems in use worldwide.
Automatic batch low temperature plasma system for surface treatment and cleaning of organize metallic and composite substrates and assemblies.
- Lowest cost of ownership asher, > 95% uptime, 320 systems in production
- High throughput
- Very small footprint: 80cm (32¿) Width x 80cm (32¿) Length x 70cm (28¿) Height
- Front and backside isotropic removal
- Downstream ashing for minimized device damage
- 75mm-1500mm wafer capability
- Pick and place wafer handling
- Precise endpoint detection
- Up to 2 MFC¿s
- Pressure control, option
- SMIF compatible
- SECS II interface, multiple process step capability
- Variable lamp heating for temperature control
- Table top or floor/through the wall designs
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408-654-9500
