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Therma-Wave Opti-Probe 1600

Film Measurement System for Multilayer Thick or Thin Films

System includes patern recognition.

Thickness limits from 0 A to:

-Oxide, 150,000 A

-Nitride 200,000 A

-Photoresist 175,000 A

-Polyimide, 200,00 A

System allows a user to measure a film's reflectivity. Spatial averaging and and spectrometer regions displayed. Contour and 3D maps for all template measurements.

Thick/Thin film calculations for non-absorbing films.

100/120V, 50/60Hz