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Category   >> Inspection Systems   >> KLA-Tencor 6200 Surfscan
Category   >> Metrology - Test & Inspection System   >> KLA-Tencor 6200 Surfscan
Category   >> New Arrivals   >> KLA-Tencor 6200 Surfscan
KLA-Tencor 6200 Surfscan

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Surface haze detection Surface

Capable of handling 4", 5", 6" and 8" wafer, customer to spec wafer

Size Laser type wavelength: ArIon 488 30mW %

Particle Sensitivity: 0.10um @95% um Measurement Range: 0.09-9999um  

Haze Sensitivity Resolution 0.05ppm @ 1

Repeatability:

 
 

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