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Thermawave Optiprobe 2600

Thin Film Measurement System

4,5,6,8 inch wafer compatible, System set up for 5" operation 4,5,6,8 i

2 Unicassette Loader Stations

3.5Fd, 120MB MO Drive, HD 3.5Fd, 1

SW Version 3.0E

Capable of determining thickness and optical parameters of multiple

films simultaneously.