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Steag AST SHS2000 Rapid Thermal Processing System
Wafer Size: 75 to 200mm (Customer to specify) 

4 cassette ports

Cooling stations 1 

 Process Control: 386/486 Computer System With Hard Disc Process Control:

GEM Communication Operator Panel for 10 Operator Selectable Recip Operator Panel

TCA Eurotherm Pyromer model
Equiped with Robot Handling

Lamp checker model: LCMU Lamp checker model:
Standard 27 lamps / Lamp Quartz Process Cham

5 MFC's (Bronkhorst 9115-569M / F201C)

Process Gases:
Standard: NH3, N20, Ar, 02

Recommended Temperture Range: 400c to 1200

Absolute Temperature Accuracy:
(W/ Thermocouple Control: + or - 2c
(W/ Pyrometer Control : + or - 4c
Temperture Duration: 0-1000 Sec Per Step Temperture Duration: 0-1000 Sec Per