DownStream Microwave Cassette to Cassette Single Wafer Photoresist Asher. Capable 3" to 6" Wafers 75mm to 150mm wafer capability Front and backside isotropic removal 4 MFC's capability (System includes 2 MFC's calibrated to customer gas specifications) End point detection Pick and place wafer handling SECS II Interface Ash Rates 2u -5u/min positive photoresist > 8u/min negative Unifo Uniformity + or - 5-20% Throughput: up to 90 wph Microwave: 1000 watts Pressure: 1.75 to 2.5 Torr Lamp Time (variable): 0-18 sec.Temperature (variable): 150-300c (typical)
408-654-9500
