Surplus Process Equipment Corporation - Surplus Process Equipment Corporation, Semiconductor Process Equipment

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New Arrivals

Asher Systems

Chillers

Cleaning Systems

Dicing Saws

Ellipsometers/Film Thickness Measurement

Etchers

Evaporators

Furnaces-Autoclaves

Gas Cabinets

HMDS Equipment

Inspection Systems

Ion Implantors

Ion Mills

Laser Marking Systems

LPECVD

Mask Aligner - Exposure Systems - UV

Mask Equipment

Metrology - Test & Inspection System

Microscopes-Comparators

Miscellaneous

Ovens

PECVD - Oxidation

Photoresist Coaters-Tracks

Plasma Ashers

Plasma Etchers

Power Supplies-RF-Plasma-E-Gun

Pumps-Vacuum

Reactors

RIE

Robots-Stages-Material Handling

RTA - RTP Rapid Thermal Annealing/Processor

SEM - Scanning Electron Microscopes

Spin Rinser Dryer

Sputtering Systems

Steppers

UV Systems

Vacuum Valves-Chambers-Systems

Vibration-Isolation Tables

Wet Process Systems-Stripper-Develop

X-Ray

Search by Part Type: All Parts

GaSonics Parts

KLA-Tencor Parts

ADE Parts

Karl Suss Parts

Miscellaneous Parts

See our entire inventory

6/12/2008 :New Arrivals: 2 Ultra T SWC111M Cleaners - 2 Evergreen SSEC Cleaners (Models M10 and 50XP) - Verteq 1800 6AR - 4/15/2008 :New Arrivals: Denton Desk II Sputter - Technics PEIIB Planar Etch Plasma System - 4/01/2008 :New Arrivals: ADE 8100 Microscan - APT Model:3455 Metal Lift Off System - Branson IPC 2000/2 - Leatherwood Plastics Cleaning and Plating System - Rudolph Auto-EL IV - Western Magnum Laminator - 2/18/2008 :New Arrivals: Karl Suss MA150 Mask Aligner - 1/07/2008 :New Arrivals: ADE 9500 - KLA Tencor Surfscan 6220

SPEC Equipment Corp. now has a licensing agreement to manufacture new GaSonics legacy product lines from Novellus Systems, Inc. PR Sheet PDF

Novellus licensed SPEC Equipment the following GaSonics products

Aura 1000 Photo Resist Asher System
AE2001 Isotropic Etch System

Aura 2000LL Photo Resist Asher System AE2000LL Isotropic Etch System

L3510 Photo Resist Asher System VHP High-Pressure Oxidation System

GaSonics Plasma Systems

SPEC, Manufactures new GaSonics asher and etcher machines. SPEC also provides field service, installation, spare parts and system upgrades. More Info

KLA-Tencor Metrology Systems Sales and Service

SPEC, Refurbishes to original OEM Specification of KLA-Tencor products. Including refurb units, repairs, field service and installation. More Info

Karl Suss Mask Aligner Sales and Service

SPEC, Refurbishes to original OEM Specification of Karl Suss products. Including refurb units, repairs, field service and installation. More Info

ADE-Service.com

Attention: SPEC Equipment now offers ADE service and sales support as well as ADE Parts.

SPEC offers quality brand name and hard-to-find front-end semiconductor equipment and parts - in stock at our 20,000 square foot warehouse facility. SPEC Equipment also remanufactures all products to meet the manufacturer's original specifications in our 12,000 square foot manufacturing facility with a class 1000 and 100 clean room. Learn more about SPEC

SPEC can track, refurbish, and sell underutilized or unwanted tools. Upgrade your equipment before it becomes obsolete and Free up capital. Consolidate with us and receive a 5% credit toward the purchase of other equipment from SPEC.