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Water Soluble Solvent Tool (WST) is designed for sray delivery of non-phenolic, water soluble chemical across waferor substrate surface, rinse with D.I. water and nitrogen pured spin dry cycyle Semitool WST 308 Water Soluble Develop/Strip ToolWater Soluble Solvent Tool (WST) is designed for sray delivery of non-phenolic, water soluble chemical acroos waferor substrate surface, rinse with D.I. water and nitrogen pured spin dry cycyle
Typical system features are two tanks with intank heater, one fresh and one reclaim for process chemical. Filter are included on reclaim tanks.Non-phenolic biodegradable, low-toxicity chemicals to strip/develop or clean up to 100cG-PSS-202 Controller
Membrane Keypad and display
Heated fresh and reclaim tanks
1/2 floppy drive
Capability of 100mm - 125mm wafer
System cabinet material is stainless steel
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408-654-9500
