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High sensitivity surface profiler measuring roughness, waviness and step height Tencor P2 Long Scan Profilometer.High sensitivity surface profiler measuring roughness, waviness and step height Measure mirco-roughness with 1 angstrom resolution Measure waviness over a full 8" scan Measurement of vertical features ranging from nder 100A (0.4 micro inches) to close to 0.3mm (+ or - 11mils) with a vertical resolution of 1 or 25 A Ability to repeat a scan up to 10 times automatically calculate the average Scan Length: 210mm Scan Speed: 1 um/sec to 25mm/sec.Vertical range: +/- 6.5um at 1A resolution & +/- 150um at 25A.Vertical Linearity: 10A below 2000A, +/- .5% above 2000A.Horizontal Resolution: 100A at 1 um/second scan speed up to 5000 data points per scan depending on scan speed and length.Horz. Resolution max. 1 data point every: @1um/s scan speed = .01um (100A) Max Sample Size: 254 x 254mm; 10"x10" Stylus force: 1 - 100 mg @ .1mg resolution Vertical Resolution (max.): @1A = +/-6.5um; @25A = +/- 150um
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