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Long Scan Profiler Measurement of vertical features ranging from 100A to 0.3mm KLA / Tencor P20H Long Scan Profiler Measurement of vertical features ranging from under 100 to approximately 0.3 mm, with a vertical resolution of 1 or 25. Ability to fit and level data, allowing accurate measurements on curved surfaces Handles wafers from 3" to 8" cassette to cassette 2-D and 3-D plots and contour maps Scan up to 25 wafers without operator intervention Full 8" scanning
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408-654-9500
