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Canon MPA 500 Projection Mask Aligner Features/Specifications:
- Auto Feeder: Single, cassette to cassette, backside wafer handling
- Wafer size: currently 5" (4" and 3" sizes available)
- Mask size: currently 6" (5" and 5" sizes available)
- Resolution: 1.5µm (positive resist)
- Depth of Focus: > + 6µm (linewidth 1.5µm)
- Distortion: 3sigma < 0.5µm
- Scanning Accuracy: < + 1.5%
- Auto Alignment Accuracy: LBS AA 3sigma < 0.6µm (HeNe laser beam scan)
- Throughput (6¡±wafer): > 83 wfs/h (first mask mode) / > 72 wfs/h (LBS AA mode)
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408-654-9500
