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Rapid Thermal Processor PC Control Capability of 2" to 5" Wafers

Apid Thermal Processor PC Controller Steady State Temperature Range: 400c - 1200c

Steady State Temperature Stability: (+ or -) 7c

Heating Rate: 150c Per Second

Cooling Rate: Temperature Dependent Max 150c Per Second Capability of 2" to 5" Wafers