Std- EMI Ring/Waveguide/A1000

Rev B- EMI Ring, Waveguide

New, Waveguide mounting plate

Std - Chamber top

Std - Waveguide Gas Cap Assembly

Std - Ring/Window Mounting

Std - Chamber Bottom

Std - MFC Stainless Manifold W/VCR

Std - Door/Plate Door Support

Std - Bus/Bar Grounding

Std - Housing

Std - Door Rods/Shaft-lower for Bearing slides/handling

Std - Door/Wafer Pin, small support

Std - Chamber Body

Std - Door/Bracket, Wafer Basket, attaches to door.

Std - Door/Chamber

Std - Door/Plate Pedestal

Std - Door Slider/Attaches to Rails

Std - Bracket for main Vac.

Std - Shower Head Housing